Lab facilities

ALD Research Group is equipped:

  • Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD system)

  • Hybrid ALD-CVD system

  • Microbalance (LF 225DR)

  • Filmetrics F20-UV for ultrathin film characterization

  • Atmosphere-controlled plasma-assisted surface treatment system

  • Vented chemical storage cabinets

  • Keithley 2450 - measurement system

  • Ultrasonic cleaner

  • Hot plates

Shared research equipments: wet-bench, chemical labs, annealing systems with controllable atmosphere, etc.

The ALD Research Group is in collaboration with following research groups at Phenikaa University: