Lab facilities

ALD research group is equipped

  • Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD system)

  • Hybrid ALD-CVD system

  • Filmetrics F20-UV for ultrathin film characterization

  • Atmospheric plasma-assisted surface treatment system

  • Vented chemical storage cabinets

  • Keithley 2450 - measurement system

  • Manipulator systems for aligning heterostructure of 2D materials

  • Chemical labs

  • Fluidized-Bed Atomic Layer Deposition reactor, Plasma-Assisted Spatial Atomic Layer Deposition system, Inductively Coupled Plasma Optical Emission spectroscopy (ICP-OES), Mass spectroscopy and Ellipsometry are coming very soon...

Atmospheric ALD system


Hybrid ALD-CVD system



Filmetrics F20-UV, an optical tool for thin film characterization




Keithley 2450 - measurement system

Manipulators



Chemical labs



Fluidized-Bed Atomic Layer Deposition reactor, Inductively Coupled Plasma Optical Emission spectroscopy (ICP-OES), Mass spectroscopy and Ellipsometry are coming very soon...