Lab facilities

ALD Research Group is equipped:

• Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD system)

• Hybrid ALD-CVD system

• Microbalance (LF 225DR)

• Filmetrics F20-UV for ultrathin film characterization

• Atmosphere-controlled plasma-assisted surface treatment system

• Vented chemical storage cabinets

• Keithley 2450 - measurement system

• Ultrasonic cleaner

• Hot plates

Shared research equipments: wet-bench, chemical labs, annealing systems with controllable atmosphere, etc.

The ALD Research Group is in collaboration with following research groups at Phenikaa University:

• Nanosensors Lab (Prof. NGUYEN Van Hieu): https://nslab.phenikaa-uni.edu.vn/

• Nanomaterials for biomedical and environmental applications (Prof. LE Anh Tuan): https://neblab.phenikaa-uni.edu.vn/

• Nanomaterials for electronics and renewable energy (Dr. DAS Raja): https://nerelab.phenikaa-uni.edu.vn/home

• Renewable energy conversion and storage laboratory (Dr. DAO Van Duong): https://recslab.phenikaa-uni.edu.vn/home