ALD research group is equipped

• Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD system)

• Hybrid ALD-CVD system

• Filmetrics F20-UV for ultrathin film characterization

• Atmospheric plasma-assisted surface treatment system

• Vented chemical storage cabinets

• Keithley 2450 - measurement system

• Manipulator systems for aligning heterostructure of 2D materials

• Chemical labs

• Fluidized-Bed Atomic Layer Deposition reactor, Plasma-Assisted Spatial Atomic Layer Deposition system, Inductively Coupled Plasma Optical Emission spectroscopy (ICP-OES), Mass spectroscopy and Ellipsometry are coming very soon...