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ALD Research Group is equipped with:
Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD system)
Hybrid ALD-CVD system
Fluidized Bed Reactor Atomic Layer Deposition system (FBR-ALD)
Woollam EC-120 Spectroscopic Ellipsometer
Karl Suss Four-Point Probe station
Filmetrics F20-UV for ultrathin film characterization
Keithley 2450 - measurement system
Manipulator systems for aligning heterostructure of 2D materials
Chemical labs
Plasma-Assisted Spatial Atomic Layer Deposition system, and Mass Spectroscopy are coming very soon.
Atmospheric ALD system
Hybrid ALD-CVD system
Fluidized Bed Reactor ALD System
Agilent 5800 ICP-OES System
ESS CatalySys Mass Spectrometer
Powder Sieving Machine
Woollam EC-120 Spectroscopic Ellipsometer
Karl Suss Probe Station and Veeco Four-Point Probe System
Filmetrics F20-UV, an optical tool for thin film characterization
Keithley 2450 - measurement system
Manipulators
Chemical labs
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