Lab facilities
ALD research group is equipped
Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD system)
Hybrid ALD-CVD system
Filmetrics F20-UV for ultrathin film characterization
Atmospheric plasma-assisted surface treatment system
Vented chemical storage cabinets
Keithley 2450 - measurement system
Manipulator systems for aligning heterostructure of 2D materials
Chemical labs
Fluidized-Bed Atomic Layer Deposition reactor, Plasma-Assisted Spatial Atomic Layer Deposition system, Inductively Coupled Plasma Optical Emission spectroscopy (ICP-OES), Mass spectroscopy and Ellipsometry are coming very soon...
Atmospheric ALD system
Hybrid ALD-CVD system
Filmetrics F20-UV, an optical tool for thin film characterization
Keithley 2450 - measurement system
Manipulators
Chemical labs
Fluidized-Bed Atomic Layer Deposition reactor, Inductively Coupled Plasma Optical Emission spectroscopy (ICP-OES), Mass spectroscopy and Ellipsometry are coming very soon...